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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.
With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
- Sales Rank: #748853 in Books
- Published on: 2012-11-15
- Released on: 2012-11-15
- Original language: English
- Number of items: 1
- Dimensions: 7.50" h x 1.20" w x 9.20" l, 2.37 pounds
- Binding: Paperback
- 688 pages
Review
"This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques."--Xian-An Cao, West Virginia University
"I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material."--Trevor Thornton, Arizona State University
About the Author
Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.
Most helpful customer reviews
0 of 0 people found the following review helpful.
stay with the classic books, don't switch to this
By Steven
This book is not well-written, fails to explain a large number of their variables/derivations, contains a substantial # of errors, and the solutions are absolutely incorrect for several examples and problems.
They even have placed an incorrect intrinsic carrier concentration plot in this textbook as well...
definitely do not recommend... go with the classic books instead
0 of 0 people found the following review helpful.
Book is good but has issues
By Daniel Dupuis
Some of the variables in the equations are not clearly defined, and the author uses t for both time AND thickness which makes it confusing unless you go through the book in numerical order. The questions are not always worded clearly. The text has useful and relevant processing topics and goes into good detail about them.
0 of 0 people found the following review helpful.
Five Stars
By aibotdis
Very good
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